Spatial resolution of nanostructural analysis by electron energy-loss spectroscopy and energy-filtered imaging

被引：21

作者：

Egerton, RF ^{[1
]}

机构：

[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2J1, Canada

来源：

JOURNAL OF ELECTRON MICROSCOPY | 1999年 / 48卷 / 06期

关键词：

elemental analysis; EELS; EFTEM; atomic resolution;

D O I：

10.1093/oxfordjournals.jmicro.a023739

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We consider several factors which determine the spatial resolution of elemental analysis by core-loss spectroscopy or energy-filtered imaging. The physics of electron scattering, in combination with modern electron optics, allows a resolution below 1 nm. However, the low core-loss cross sections imply that atomic resolution is only feasible for radiation-resistant specimens and an electron microscope fitted with a field-emission source.

引用

页码：711 / 716

页数：6

共 14 条

[1]

Barth JE, 1996, OPTIK, V101, P101

[2] EELS in the STEM: Determination of materials properties on the atomic scale [J].

Browning, ND ;

Wallis, DJ ;

Nellist, PD ;

Pennycook, SJ .

MICRON, 1997, 28 (05) :333-348

[3]

Egerton R. F, 1996, ELECT ENERGY LOSS SP

[4] The effect of lens aberrations on the spatial resolution of an energy-filtered TEM image [J].

Egerton, RF ;

Crozier, PA .

MICRON, 1997, 28 (02) :117-124

[5] THEORETICAL AND OBSERVED ELECTRON-MICROSCOPE IMAGES OF IMPURITY ATOMS IN THIN-CRYSTALS FORMED BY L-SHELL IONIZATION ELECTRONS [J].

ENDOH, H ;

HASHIMOTO, H ;

MAKITA, Y .

ULTRAMICROSCOPY, 1994, 56 (1-3) :108-120

[6]

FURDANOWICZ W, 1991, I PHYS C, V119, P437

[7]

GOLDSTEIN JI, 1977, SCANNING ELECTRON MI, V1, P315

[8]

HOLBROOK OF, 1995, P MICROSCOPY MICROAN, P278

[9] THEORY OF IMAGE-FORMATION BY INELASTICALLY SCATTERED ELECTRONS IN THE ELECTRON-MICROSCOPE [J].

KOHL, H ;

ROSE, H .

ADVANCES IN IMAGING AND ELECTRON PHYSICS, 1985, 65 :173-227

[10]

MORY C, 1985, J MICROSC SPECT ELEC, V10, P381

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