Magnification and mass resolution in local-electrode atom probes

被引:24
作者
Bajikar, SS
Larson, DJ
Kelly, TF
Camus, PP
机构
[1] UNIV WISCONSIN,MAT SCI PROGRAM,MADISON,WI 53706
[2] UNIV WISCONSIN,DEPT MAT SCI & ENGN,MADISON,WI 53706
[3] UNIV WISCONSIN,CTR APPL SUPERCONDUCT,MADISON,WI 53706
基金
美国国家科学基金会;
关键词
D O I
10.1016/S0304-3991(96)00064-2
中图分类号
TH742 [显微镜];
学科分类号
摘要
The mass resolution of a local-electrode atom probe can be improved by accelerating the evaporated ions to a higher energy in order to reduce the energy-deficit-related dispersion. A simple model of the instrument is developed and used to estimate the effects of this secondary acceleration on image magnification and mass resolution, Effects of non-instantaneous secondary acceleration, variations in the secondary acceleration field distribution and electrode length are evaluated using the model. The addition of an acceleration electrode after the extraction electrode is shown to improve the performance of local-electrode atom probes.
引用
收藏
页码:119 / 129
页数:11
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