Reactive sputtering and the use of anodes for optical coatings

Magnetron sputtering has allowed very large surfaces to be coated with uniform layers of metals and electrically conducting ceramic materials. The results are presented for two solutions for long term production of large reproducible coatings, by using small multiple anodes which are electrically sequenced into and out of the role of anode using single cylindrical sources, and by using mid-frequency alternating current (ac) with a pair of cylindrical magnetrons having no discrete anode. (C) 1997 Elsevier Science B.V.