Emerging technologies for ferroelectric films and coatings

被引：8

作者：

Sayer, M

Lukacs, M

Olding, T

机构：

[1] Department of Physics, Queen's University, Kingston

来源：

INTEGRATED FERROELECTRICS | 1997年 / 17卷 / 1-4期

关键词：

ferroelectrics; piezoelectrics; actuators; ultrasonic;

D O I：

10.1080/10584589708012976

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Chemical solution deposition (CSD) allows the integration of ferroelectric and piezoelectric coatings with both silicon technology and in large scale macroscopic devices: Applications of coatings as actuators, in high frequency ultrasonic transducers and for piezoelectric transformers are discussed.

引用

页码：1 / 10

页数：10

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