共 17 条
[1]
ELECTRICAL CHARACTERIZATION OF RADIO-FREQUENCY PARALLEL-PLATE CAPACITIVELY COUPLED DISCHARGES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (04)
:2774-2783
[5]
MEASUREMENT AND ANALYSIS OF RADIO-FREQUENCY GLOW-DISCHARGE ELECTRICAL-IMPEDANCE AND NETWORK POWER LOSS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (02)
:916-923