Barrier-torch discharge plasma source for surface treatment technology at atmospheric pressure

被引:70
作者
Hubicka, Z
Cada, M
Sícha, M
Churpita, A
Pokorny, P
Soukup, L
Jastrabík, L
机构
[1] Acad Sci Czech Republ, Inst Phys, Div Opt, Prague 18221, Czech Republic
[2] Charles Univ, Fac Math & Phys, Dept Elect & Vacuum Phys, CR-18000 Prague 8, Czech Republic
[3] NASc Ukraine, Inst Mat Sci Problems, UA-03142 Kiev, Ukraine
关键词
D O I
10.1088/0963-0252/11/2/311
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The description and investigation of a new atmospheric plasma source for the treatment and coatings of surfaces are presented in this paper. This new system is a modification of a well-known atmospheric torch discharge stabilized by a flowing channel of the working gas through an RF powered nozzle. The new version of this source prevents the transition to the regime with hot electrodes. This modification is suitable for surface and coatings applications of such substrates sensitive to overheating causing undesirable phase transition or melting. The new source called in our paper as an RF barrier-torch atmospheric discharge employs dielectrically coated nozzles instead of bare metallic ones. In that case, the plasma jet has quite different properties, as it is clear from presented experiments. The new version allowed excitation of the atmospheric plasma channel interacting with the substrate independently on the conductivity of the substrate. Simultaneously it is possible to hold the substrate temperature under atmospheric jet interaction below the limit point of aluminium melting or below an even lower limit of 80degreesC in a pulse-modulated mode. Extension to the multi-nozzle barrier-torch system was attained with the application of nine quartz nozzles. This multi-plasma jet excitation and its interaction was demonstrated with the substrate made of either quartz or aluminium plate, both possibly with non-flat shape. Emission spectroscopy and RF voltage and current amplitude measurements were employed in order to characterize the RF barrier-torch discharge.
引用
收藏
页码:195 / 202
页数:8
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