Photonic crystal slab waveguides fabricated by the combination of holography and photolithography

被引：28

作者：

Cho, CO

Roh, YG

Park, Y

Jeon, H ^{[1
]}

Lee, BS

Kim, HW

Choe, YH

机构：

[1] Seoul Natl Univ, Sch Phys, Seoul 151747, South Korea

[2] Seoul Natl Univ, Inter Univ Semicond Res Ctr, Seoul 151747, South Korea

[3] LG Electron Inst Technol, LG Elite, Innovat Ctr, Seoul 137724, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 4A期

关键词：

photonic crystal; waveguide; photonic band gap; combination lithography; holography; photolithography; propagation loss;

D O I：

10.1143/JJAP.43.1384

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have fabricated air-bridge type two-dimensional photonic crystal waveguides (2D-PCWs) using two high-throughput processes only: holography and photolithography. Despite the existence of misalignments of a defect line with respect to the air-hole arrays, waveguiding in both straight and 90degrees-bent PCWs was clearly observed at the wavelength of 1.55 mum. We also estimated the upper bound in propagation loss of our straight PCWs, which was measured to be about 40cm(-1).

引用

页码：1384 / 1387

页数：4

共 15 条

[1] Three-dimensional control of light in a two-dimensional photonic crystal slab [J].