Microelectrodes on a silicon chip for label-free capacitive DNA sensing

被引：34

作者：

Guiducci, Carlotta ^{[1
]}

Stagni, Claudio ^{[1
]}

Fischetti, Alessandra ^{[1
]}

Mastromatteo, Ubaldo ^{[1
]}

Benini, Luca ^{[1
]}

Ricco, Bruno ^{[1
]}

机构：

[1] Univ Bologna, Dept Elect Engn & Comp Sci, DEIS, I-40136 Bologna, Italy

来源：

IEEE SENSORS JOURNAL | 2006年 / 6卷 / 05期

关键词：

capacitance detection on a silicon lab on a chip; fully electrical deoxyribonucleic acid (DNA) detection technique; gold microelectrodes; impedance spectroscopy; label-free technique;

D O I：

10.1109/JSEN.2006.877979

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the experimental characterization of two-terminal microfabricated capacitors for microarrays with an electrical sensing of label-free deoxyribonucleic acid (DNA). So far, such a concept has been demonstrated only in experimental setups featuring dimensions much larger than those typical of microfabrication. Therefore, this paper investigates: 1) the compatibility of the silicon microelectronic processes with biological functionalization procedures; 2) the effects of parasitics when electrodes have realistic dimensions; 3) measurement stability and reproducibility; and 4) the possibility of a fully integrated stand-alone device. The obtained results clearly indicate that two-terminal capacitive sensing with fully integrated electronics represents a viable technology for a DNA label-free detection/recognition.

引用

页码：1084 / 1093

页数：10

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