New materials, containing nanodispersed particles (Ag, Pb, Mn, Ca, Sm, Na, CdS, ZnS) in the thin polymer film have been obtained via low temperature codeposition of metal (or sulphide) with reactive para-xylylene monomer vapours at 100 K. Electric conductivity of the films was studied during the components co-condensation, upon sample annealing in range 80-300 K and maintaining at constant temperature. With a rise of metal nanoparticles in the polymer matrix, the conductivity tends to increase. The conductivity may be determined as a tunnel transfer of charge from one nanoparticle to another through a thin dielectric layer (up to 50 nm) of polymer matrix. (C) 1999 Elsevier Science S.A. All rights reserved.