Piezoelectric cantilever beams actuated by PZT sol-gel thin film

被引：71

作者：

Luginbuhl, P

Racine, GA

Lerch, P

Romanowicz, B

Brooks, KG

deRooij, NF

Renaud, P

机构：

[1] ECOLE POLYTECH FED LAUSANNE,INST MICROTECHNOL,CH-1015 LAUSANNE,SWITZERLAND

[2] UNIV NEUCHATEL,LAB CERAM,CH-2000 NEUCHATEL,SWITZERLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期

关键词：

lead zirconium titanate; piezoelectric cantilevers; sol-gel;

D O I：

10.1016/S0924-4247(95)01196-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The mechanical response of piezoelectric cantilever beams actuated by sol-gel-derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflection of the beams with a standard interferometry method. Interferometric displacement measurements, electrical measurements and finite-element simulations are reported to determine the piezoelectric coefficient d(31) of the PZT thin film.

引用

页码：530 / 535

页数：6