Seeded growth of AlN bulk single crystals by sublimation

被引:120
作者
Schlesser, R [1 ]
Dalmau, R [1 ]
Sitar, Z [1 ]
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
关键词
growth from vapors; seed crystals; single crystal growth; nitrides;
D O I
10.1016/S0022-0248(02)01319-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
AIN bulk single crystals were grown by sublimation of AIN powder at temperatures of 2110-2300degreesC in an open crucible geometry in a 400 Torr nitrogen atmosphere. Small, single crystalline AIN e-platelets, prepared by vaporization of Al in a nitrogen atmosphere, were used as seeds. Seeded growth occurred preferentially in the crystallographic c-direction, with growth rates exceeding 500mum/h, while the seed crystals grew only marginally in the c-plane. Transparent, centimeter-sized AIN single crystals were grown within 24h. Characterization by X-ray diffraction showed that rocking curves around the (0 0 0 2) reflection were very narrow (25 arcsec full-width at half-maximum), thus indicating very high crystalline quality of the material grown on the seeds. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:416 / 420
页数:5
相关论文
共 12 条
[1]   Sublimation growth and characterization of bulk aluminum nitride single crystals [J].
Balkas, CM ;
Sitar, Z ;
Zheleva, T ;
Bergman, L ;
Nemanich, R ;
Davis, RF .
JOURNAL OF CRYSTAL GROWTH, 1997, 179 (3-4) :363-370
[2]   Growth of SiC and III-V nitride thin films via gas-source molecular beam epitaxy and their characterization [J].
Davis, RF ;
Tanaka, S ;
Rowland, LB ;
Kern, RS ;
Sitar, Z ;
Ailey, SK ;
Wang, C .
JOURNAL OF CRYSTAL GROWTH, 1996, 164 (1-4) :132-142
[4]   GROWTH-RATE, SURFACE-MORPHOLOGY, AND DEFECT MICROSTRUCTURES OF BETA-SIC FILMS CHEMICALLY VAPOR-DEPOSITED ON 6H-SIC SUBSTRATES [J].
KONG, HS ;
GLASS, JT ;
DAVIS, RF .
JOURNAL OF MATERIALS RESEARCH, 1989, 4 (01) :204-214
[5]   Transport effects in the sublimation growth of aluminum nitride [J].
Liu, LH ;
Edgar, JH .
JOURNAL OF CRYSTAL GROWTH, 2000, 220 (03) :243-253
[6]   III-V nitrides - important future electronic materials [J].
Monemar, B .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1999, 10 (04) :227-254
[7]   Continuous-wave operation of InGaN/GaN/AlGaN-based laser diodes grown on GaN substrates [J].
Nakamura, S ;
Senoh, M ;
Nagahama, S ;
Iwasa, N ;
Yamada, T ;
Matsushita, T ;
Kiyoku, H ;
Sugimoto, Y ;
Kozaki, T ;
Umemoto, H ;
Sano, M ;
Chocho, K .
APPLIED PHYSICS LETTERS, 1998, 72 (16) :2014-2016
[8]   MORPHOLOGIE UND WACHSTUMSMECHANISMUS VON AIN-EINKRISTALLEN [J].
PASTRNAK, J ;
ROSKOVCOVA, L .
PHYSICA STATUS SOLIDI, 1964, 7 (01) :331-338
[9]  
Rojo JC, 2001, J CRYST GROWTH, V231, P317, DOI 10.1016/S0022-0248(01)01452-X
[10]   On mechanisms of sublimation growth of AlN bulk crystals [J].
Segal, AS ;
Karpov, SY ;
Makarov, YN ;
Mokhov, EN ;
Roenkov, AD ;
Ramm, MG ;
Vodakov, YA .
JOURNAL OF CRYSTAL GROWTH, 2000, 211 (1-4) :68-72