Laser micro-machining of small objects for high-energy laser experiments

被引：6

作者：

Bednarczyk, S ^{[1
]}

Bechir, R ^{[1
]}

Baclet, P ^{[1
]}

机构：

[1] Commissariat Energie Atom, F-21120 Is Sur Tille, France

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / Suppl 1期

关键词：

PACS: 42.62.Cf;

D O I：

10.1007/s003390051450

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Targets for high-energy laser experiments are polymer or metal objects of small dimensions. These objects need high-precision processes (typical sizes of a few hundred micrometers with micrometer accuracy). In this paper, some targets for high-energy laser experiments obtained by picosecond Q-switched Nd:YAG laser and KrF excimer laser micro-machining are presented. All of the targets use an original process. Activities include cutting, drilling, and marking elements. A summary of targets made using laser processes will be presented.

引用

页码：S495 / S500

页数：6