Polyphosphazene membrane as a very sensitive resistive and capacitive humidity sensor

被引：23

作者：

Anchisini, R ^{[1
]}

Faglia, G ^{[1
]}

Gallazzi, MC ^{[1
]}

Sberveglieri, G ^{[1
]}

Zerbi, G ^{[1
]}

机构：

[1] UNIV BRESCIA,DIPARTIMENTO CHIM & FIS MAT,I-25133 BRESCIA,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 35卷 / 1-3期

关键词：

polyphosphazene membrane; resistive sensor; capacitive humidity sensor;

D O I：

10.1016/S0925-4005(97)80037-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Polydimethylphosphazene (PDMP) has been tested for the first time to fabricate a water resistive humidity sensor. The device consists of a PDMP free-standing membrane coated on both sides with gold electrodes forming a parallel capacitor. A change in electrical capacitance and resistance of about three orders of magnitude was observed with increasing relative humidity (RH) from 0% to 100%. The results show that polyphosphazenes are promising materials for resistive and capacitive sensors in the complete range of RH.

引用

页码：99 / 102

页数：4

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