共 12 条
[1]
Committee on Optical Science and Engineering, 1998, HARN LIGHT
[2]
DAMATO D, 1991, P SPIE, V1544
[3]
DANNBERG P, 1994, MICROSYST TECHNOL, P281
[4]
Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass
[J].
APPLIED OPTICS,
1997, 36 (20)
:4675-4680
[5]
Integration of polymeric micro-optical elements with planar waveguiding circuits
[J].
MICRO-OPTICS INTEGRATION AND ASSEMBLIES,
1998, 3289
:122-133
[7]
ERDMANN L, 1998, THESIS U JENA
[9]
Nakagawa G., 1994, OPT ENG, V33, P3547
[10]
ROSE K, 1992, MATER RES SOC SYMP P, V271, P731, DOI 10.1557/PROC-271-731