The dynamic simulation of micropumps puts strong requirements on the simulator. Instead of developing a new computer code for coping with these simulation problems, this work emphasizes the harmonic integration of existing finite-element and electrical simulators to effectively predict the actuator performance with minimum software developing effort. This approach is applied to a thermo-pneumatic micropump.
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页码:128 / 130
页数:3
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[1]
GERLACH T, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P221, DOI 10.1109/MEMSYS.1995.472576