Mechanisms affecting kinetic energies of laser-ablated materials

被引:30
作者
Chen, KR [1 ]
Leboeuf, JN [1 ]
Wood, RF [1 ]
Geohegan, DB [1 ]
Donato, JM [1 ]
Liu, CL [1 ]
Puretzky, AA [1 ]
机构
[1] NATL CHANGHUA UNIV EDUC, DEPT PHYS, CHANGHUA 50058, TAIWAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1996年 / 14卷 / 03期
关键词
D O I
10.1116/1.580278
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A dynamic source effect was found to accelerate the plume expansion velocity much higher than that from a conventional free-expansion model. A self-similar theory and a hydrodynamic model are developed to study this effect, which may help to explain experimentally observed high front expansion velocity. Background gas can also affect the kinetic energies. High background gas may cause the ablated materials to go backward. Experimentally observed plume splitting is also discussed. (C) 1996 American Vacuum Society.
引用
收藏
页码:1111 / 1114
页数:4
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