Measurement of small apertures

被引:5
作者
Fedchak, JA
Carter, AC
Raju, D
机构
[1] Jung Res & Dev Corp, Washington, DC 20009 USA
[2] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
关键词
D O I
10.1088/0026-1394/43/2/S09
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The Low Background Infrared calibration facility at the National Institute of Standards and Technology (NIST) is developing an instrument to measure the relative areas of apertures with diameters ranging from 5 mm to 0.05 mm. NIST already has the capability of determining the absolute area of apertures with diameters larger than 0.35 mm. Our goal is to measure the area or radius of a 0.05 mm diameter aperture to a standard uncertainty of better than 0.1%. We report on the current status of this effort and plans for improvement. We are near the goal for apertures larger than 0.350 mm.
引用
收藏
页码:S41 / S45
页数:5
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