Deposition and properties of amorphous carbon phosphide films

被引：47

作者：

Pearce, SRJ

May, PW

Wild, RK

Hallam, KR

Heard, PJ

机构：

[1] Univ Bristol, Sch Chem, Bristol BS8 1TS, Avon, England

[2] Univ Bristol, Interface Anal Ctr, Bristol BS2 8B2, Avon, England

来源：

基金：

英国工程与自然科学研究理事会;

关键词：

diamond-like carbon; phosphorus doping; carbon phosphide; optical bandgap;

D O I：

10.1016/S0925-9635(01)00611-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Radio frequency plasma deposition has been used to deposit phosphorus doped diamond-like carbon (DLC) films on Si and quartz substrates, using a gas mixture consisting of CH4 with additions of 0-90% PH3. XPS studies reveal that the films contain P/C ratios as high as 3:1, although they also contain similar to10% H. The degree of P incorporation in the films and the deposition rate is proportional to the PH3 concentration in the gas phase. SIMS depth profiling shows the films to be homogeneous in composition, although the surfaces are oxidised due to reaction with air. The optical band gap of the films is inversely proportional to the P/C ratio, with values ranging from 2.1 to 2.6 eV. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：1041 / 1046

页数：6

共 17 条

[1]

Amaratunga GAJ, 1996, APPL PHYS LETT, V68, P2529, DOI 10.1063/1.116173

[2]

Chastain J., 1992, HDB XRAY PHOTOELECTR, V40, P221

[3] Carbon nitride thin-film growth by pulsed laser deposition [J].

Chen, MY ;

Murray, PT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1998, 16 (04) :2093-2098

[4] THE STRUCTURE OF BORON-DOPED, PHOSPHORUS-DOPED AND NITROGEN-DOPED TETRAHEDRAL AMORPHOUS-CARBON DEPOSITED BY CATHODIC ARC [J].

DAVIS, CA ;

YIN, Y ;

MCKENZIE, DR ;

HALL, LE ;

KRAVTCHINSKAIA, E ;

KEAST, V ;

AMARATUNGA, GAJ ;

VEERASAMY, VS .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1994, 170 (01) :46-50

[5] ION ENERGY-DISTRIBUTIONS IN RADIOFREQUENCY DISCHARGES [J].

FIELD, D ;

KLEMPERER, DF ;

MAY, PW ;

SONG, YP .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) :82-92

[6] MAGNETIC AND SPIN PROPERTIES OF TETRAHEDRAL AMORPHOUS-CARBON [J].

GOLZAN, MM ;

MCKENZIE, DR ;

MILLER, DJ ;

COLLOCOTT, SJ ;

AMARATUNGA, GAJ .

[7] ELECTRICAL-CONDUCTIVITY OF AMORPHOUS HYDROGENATED CARBON [J].

HELMBOLD, A ;

HAMMER, P ;

THIELE, JU ;

ROHWER, K ;

MEISSNER, D .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1995, 72 (03) :335-350

[8] PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS AND THE EFFECTS OF DOPING [J].

JONES, DI ;

STEWART, AD .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 46 (05) :423-434

[9] Growth and characterization of phosphorus doped n-type diamond thin films [J].

Koizumi, S ;

Kamo, M ;

Sato, Y ;

Mita, S ;

Sawabe, A ;

Reznik, A ;

Uzan-Saguy, C ;

Kalish, R .

[10] Studies of phosphorus doped diamond-like carbon films [J].

Kuo, MT ;

May, PW ;

Gunn, A ;

Ashfold, MNR ;

Wild, RK .

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