Fabrication of a microengineered quadrupole electrostatic lens

被引:31
作者
Syms, RRA [1 ]
Tate, TJ [1 ]
Ahmad, MM [1 ]
Taylor, S [1 ]
机构
[1] UNIV LIVERPOOL,DEPT ELECT ENGN & ELECT,LIVERPOOL L69 3BX,MERSEYSIDE,ENGLAND
关键词
electrostatic lenses; micromachining;
D O I
10.1049/el:19961362
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A self-aligning method of mounting Four parallel cylindrical electrode rods in the geometry of a miniature quadrupole electrostatic lens is described. Pairs of electrode rods are mounted in V-grooves, which are fabricated by anisotropic etching of Si wafers. Two etched dies, separated by further insulating cylindrical spacer rods, comprise a complete lens assembly. For prototype lenses with 500 mu m electrode diameter, electrode spacings were maintained to within 3% of their design value, suggesting that this method of construction Will allow sufficient precision for such lenses to act as mass analysers in miniaturised quadrupole mass spectrometers.
引用
收藏
页码:2094 / 2095
页数:2
相关论文
共 8 条
[1]  
Austin W. E., 1976, Quadrupole mass spectrometry, P121
[2]   QUADRUPOLE GAS ANALYZERS [J].
BATEY, JH .
VACUUM, 1987, 37 (8-9) :659-668
[3]  
Dawson PH., 1995, QUADRUPOLE MASS SPEC, DOI 10.1016/
[4]   THE MEASUREMENT OF 2-DIMENSIONAL FIELDS .2. STUDY OF A QUADRUPOLE MAGNET [J].
DAYTON, IE ;
SHOEMAKER, FC ;
MOZLEY, RF .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1954, 25 (05) :485-489
[5]   OPERATING PARAMETERS OF A QUADRUPOLE IN A GROUNDED CYLINDRICAL HOUSING [J].
DENISON, DR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01) :266-&
[6]  
FERRAN RJ, 1995, Patent No. 5401962
[7]  
SCHROEDER CM, 1977, BELL SYST TECH J, V57, P91
[8]  
TAYLOR S, 1995, Patent No. 95069720