Radiation damage in the TEM and SEM

被引：1872

作者：

Egerton, RF ^{[1
]}

Li, P ^{[1
]}

Malac, M ^{[1
]}

机构：

[1] Univ Alberta, Dept Phys, Fac Sci, Edmonton, AB T6G 2J1, Canada

来源：

MICRON | 2004年 / 35卷 / 06期

关键词：

radiation damage; radiolysis; electron sputtering; transmission electron microscope; scanning electron microscope;

D O I：

10.1016/j.micron.2004.02.003

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We review the various ways in which an electron beam can adversely affect an organic or inorganic sample during examination in an electron microscope. The effects considered are: heating, electrostatic charging, ionization damage (radiolysis), displacement damage, sputtering and hydrocarbon contamination. In each case, strategies to minimise the damage are identified. In the light of recent experimental evidence, we re-examine two common assumptions: that the amount of radiation damage is proportional to the electron dose and is independent of beam diameter; and that the extent of the damage is proportional to the amount of energy deposited in the specimen. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：399 / 409

页数：11

共 51 条

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