New insights on large area flexible position sensitive detectors

被引：34

作者：

Brida, D ^{[1
]}

Fortunato, E ^{[1
]}

Aguas, H ^{[1
]}

Silva, V ^{[1
]}

Marques, A ^{[1
]}

Pereira, L ^{[1
]}

Ferreira, I ^{[1
]}

Martins, R ^{[1
]}

机构：

[1] Univ Nova Lisboa, Fac Sci & Technol, CENIMAT, CEMOP,Dept Mat Sci, P-2829516 Quinta Da Torre, Caparica, Portugal

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2002年 / 299卷

关键词：

D O I：

10.1016/S0022-3093(01)01092-4

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper we present an improved version of large area (5 mm x 80 nim) flexible position sensitive detectors deposited on polymude (Kapton(R) VN) substrates with 75 mum thickness. produced by plasma enhanced chemical vapor deposition (PECVD). The structures presented by the sensors are Kapton/ZnO:Al/(pin)a-Si:H/Al and the heterostructure KaptorL/Cr/(in)a-Si:H/ZnO:Al. These sensors were characterized by spectral response, photocurrent dependence as a function of light intensity and position detectability measurements. The set of data obtained on one-dimensional position sensitive detectors based on the heterostructure show excellent performances with a maximum spectral response of 0.12 A/W at 500 nm and a non-linearity of +/-10%. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：1272 / 1276

页数：5

共 4 条

[1] A-SI-H MIS POSITION-SENSITIVE DETECTOR BY ANODIC-OXIDATION PROCESSES [J].