Can laser deposition from the liquid phase be made competitive?

被引:17
作者
Geretovszky, Z [1 ]
Szorenyi, T [1 ]
机构
[1] HUNGARIAN ACAD SCI, RES GRP LASER PHYS, H-6701 SZEGED, HUNGARY
关键词
D O I
10.1016/S0169-4332(96)00786-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Conclusions from a critical analysis of the existing literature data on laser induced liquid phase processes are compared with experimental results on the effect of scanning speed and precursor concentration on the deposition rate and pattern morphology in laser direct writing of MoO3 stripes from their aqueous solutions. The peculiarities and general trends of laser deposition from solutions are presented in terms of material transport processes. The competitiveness of this technique in specific applications is judged in comparison with LCVD and deposition from surface layers.
引用
收藏
页码:467 / 472
页数:6
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