Ferroinductor coupled discharge

被引：14

作者：

Bliokh, YP ^{[1
]}

Felsteiner, J ^{[1
]}

Slutsker, YZ ^{[1
]}

Vaisberg, PM ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 09期

关键词：

D O I：

10.1063/1.1785282

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An inductively coupled discharge was obtained at low gas pressure. Unlike an ordinary inductively coupled discharge with an inductorlike rf antenna, we used a magnetic core with a primary winding ("ferroinductor"). In this way, we increased the electric field and eliminated the magnetic field of the winding. Gas breakdown was obtained at a pressure as low as 10(-4) Torr, the discharge plasma ionization rate reached almost 100%, and the maximum plasma density was about 10(13) cm(-3). The high inductance of the ferroinductor allowed us to work even with single pulses. The efficiency of such a discharge as a plasma source could reach 90%, which makes this kind of discharge attractive for many applications. (C) 2004 American Institute of Physics.

引用

页码：1484 / 1486

页数：3