Cross-sectional transmission electron microscopic observation of etch hillocks and etch pits in LiTaO3 single crystal

Cross sections of etch hillocks and etch pits in LiTaO3 single crystal have been observed by transmission electron microscopy. The cross-sectional samples were prepared at their exact positions by the focused ion beam microfabrication method. Inverted polarized domains were observed both at the top of etch hillocks and at the bottom of etch pits, indicating that the etching figures originate in the inverted domain formed on the surface. Furthermore, some inverted domains that were pinned by lattice defects were also observed at the inner part of the crystal.