GaN microdisk light emitting diodes

被引:216
作者
Jin, SX [1 ]
Li, J [1 ]
Li, JZ [1 ]
Lin, JY [1 ]
Jiang, HX [1 ]
机构
[1] Kansas State Univ, Dept Phys, Manhattan, KS 66506 USA
关键词
D O I
10.1063/1.125841
中图分类号
O59 [应用物理学];
学科分类号
摘要
Microdisk light-emitting diodes (mu-LEDs) with diameter of about 12 mu m have been fabricated from InGaN/GaN quantum wells. Photolithographic patterning and inductively coupled plasma dry etching have been employed to fabricate these mu-LED devices. Device characteristics, such as the current-voltage characteristics, light output power, and electroluminescence (EL) spectra have been measured and compared with those of conventional broad-area LEDs. Our results showed that, for an identical area, the quantum efficiencies of mu-LED are enhanced over the conventional broad-area LEDs due to an enhanced current density and possibly microsize effects. The implications of our results on the design of future UV/blue microoptoelectronic devices are discussed. (C) 2000 American Institute of Physics. [S0003-6951(00)03805-5].
引用
收藏
页码:631 / 633
页数:3
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