Polarity Effect near the Surface and Interface of Thin Supported Polymer Films: X-ray Reflectivity Study

被引:13
作者
Ahn, Sung Il [1 ]
Kirn, Jung-Hoon [1 ]
Kim, Jae Hyun [2 ]
Jung, Jin Chul [1 ]
Chang, Taihyun [3 ]
Ree, Moonhor [3 ]
Zin, Wang-Cheol [1 ]
机构
[1] POSTECH, Dept Mat Sci & Engn, Pohang, South Korea
[2] Samsung Elect Co Ltd, Memory Div, Hwasung City, Kyonggi Do, South Korea
[3] POSTECH, Dept Chem, Pohang, South Korea
关键词
GLASS-TRANSITION TEMPERATURE; MOISTURE ABSORPTION; MONTE-CARLO; DEPENDENCE; SIMULATION; THICKNESS;
D O I
10.1021/la804260t
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Four homopolymer films (poly(methyl methacrylate) (PMMA). poly(4-vinylpyridine) (P4VP), polystyrene (PS), and poly(alpha-methyl styrene) (PAMS)) with different interactions with native Si oxide on Si wafers and three random copolymer films (PS-ran-PMMA) with different mole fractions were investigated with the X-ray reflectivity (XRR) method. The electron density profile of each film was obtained by fitting the results of the XRR measurements. A new data correction technique that uses the vertical real beam profile and a fitting method that uses the distorted wave Born approximation were combined to overcome the sensitivity limitations of XRR analysis. The results show that the chemical structures of polymer pendant groups and the interactions between the polymer films and the native Si oxide layer are strongly correlated with the density profiles of the Films near the surfaces and interfaces. Two general types of electron density profiles were found that are characterized by the polarity of the pendant group of the polymer. The reproducibility and credibility of the fitting technique were also thoroughly tested.
引用
收藏
页码:5667 / 5673
页数:7
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