Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates

被引：125

作者：

Smela, E ^{[1
]}

Kallenbach, M

Holdenried, J

机构：

[1] Riso Natl Lab, Condensed Matter Phys & Chem Dept, DK-4000 Roskilde, Denmark

[2] Tech Univ Ilmenau, D-98714 Ilmenau, Germany

[3] Univ Tubingen, D-72076 Tubingen, Germany

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1999年 / 8卷 / 04期

基金：

瑞典研究理事会;

关键词：

actuators; conjugated polymers; electrochemical devices; microelectromechanical devices; polypyrrole;

D O I：

10.1109/84.809051

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The conjugated polymer polypyrrole undergoes a volume change of several percent when its oxidation state is changed electrochemically by the application of voltages between 0 and -1 V (versus Ag/AgCl), This volume change is due to ion movements in or out of the polymer film, Bilayers of polypyrrole and gold undergo a large bending and can deliver high force. They can thus function as hinges to lift rigid components, In this work, we demonstrate that silicon plates produced by reactive ion etching can be lifted by such PPy/Au hinges. The strength and efficiency of these bilayers are also determined. [419].

引用

页码：373 / 383

页数：11

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