Synthesis of high density arrays of nanoscaled gridded field emitters based on anodic alumina

被引：14

作者：

Li, Y ^{[1
]}

Holland, ER ^{[1
]}

Wilshaw, PR ^{[1
]}

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2000年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.591314

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A technique for the fabrication of thin porous firms of anodic alumina on a rigid glass substrate is reported. This nanoporous material is the starting point for the development of high density (10(8) cm(-2)) field emitter arrays (FEAs) that have already been proven using fragile alumina membranes. A merging of these two technologies is proposed, to facilitate the production of robust, high density, large area FEAs without recourse to step and repeat lithography at the micron scale. (C) 2000 American Vacuum Society. [S0734-211X(00)04402-4].

引用

页码：994 / 996

页数：3

共 5 条

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