Influence of small inhomogeneities on the spectral characteristics of single thin films

被引：70

作者：

Tikhonravov, AV ^{[1
]}

Trubetskov, MK ^{[1
]}

Sullivan, BT ^{[1
]}

Dobrowolski, JA ^{[1
]}

机构：

[1] NATL RES COUNCIL CANADA,INST MICROSTRUCT SCI,OTTAWA,ON K1A 0R6,CANADA

来源：

APPLIED OPTICS | 1997年 / 36卷 / 28期

关键词：

D O I：

10.1364/AO.36.007188

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

It is well known that the spectral transmittance and reflectance of a thin film can be influenced by even small inhomogeneities or variations in its complex refractive-index profile. Formulas are derived that describe the theoretical variation of the spectral characteristics for small changes in the refractive index and the extinction coefficient of a homogeneous thin film. These formulas, accurate to the first order in the change in the complex refractive index, are compared with exact calculations for a number of different types of inhomogeneities. It is shown that specific qualitative features in the refractive-index pro file of a nearly homogeneous thin film frequently can be determined from an examination of the change in the spectral transmittance and reflectance at normal incidence. (C) 1997 Optical Society of America.

引用

页码：7188 / 7198

页数：11

共 11 条

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