Block copolymer micelle nanolithography on non-conductive substrates -: art. no. 101

被引:44
作者
Glass, R [1 ]
Arnold, M [1 ]
Cavalcanti-Adam, EA [1 ]
Blümmel, J [1 ]
Haferkemper, C [1 ]
Dodd, C [1 ]
Spatz, JP [1 ]
机构
[1] Heidelberg Univ, Inst Phys Chem, D-69120 Heidelberg, Germany
来源
NEW JOURNAL OF PHYSICS | 2004年 / 6卷
关键词
D O I
10.1088/1367-2630/6/1/101
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A new lithographic technique has been developed and applied to cell adhesion studies and electro-optical material development. Attachment of 6 nm Au particles, in periodic and non-periodic pattern, onto non-conductive substrates has been achieved. This was performed via a combination of diblock copolymer self-assembly and electron beam lithographic techniques. To optimize e-beam resolution on non-conductive materials, an additional carbon layer was thread-coated onto the substrates. This carbon coating and the diblock copolymer used in the self-assembly step were simultaneously removed by a final hydrogen plasma treatment to reveal Au nanodot patterns of unprecedented pattern quality. These optically transparent substrates (glass cover slips) were bio-functionalized via the Au-dot patterns to yield a platform for unique cell adhesion studies. The same Au-dot patterning technique was applied to sapphire substrates, which were subsequently employed to nucleate electro-optically active ZnO nanopost growth.
引用
收藏
页码:1 / 17
页数:17
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