Low strain sputtered polysilicon for micromechanical structures
被引:11
作者:
Abe, T
论文数: 0引用数: 0
h-index: 0
机构:
TOKYO GAS CO LTD,FRONTIER TECHNOL RES INST,YOKOHAMA,KANAGAWA,JAPANTOKYO GAS CO LTD,FRONTIER TECHNOL RES INST,YOKOHAMA,KANAGAWA,JAPAN
Abe, T
[1
]
Reed, ML
论文数: 0引用数: 0
h-index: 0
机构:
TOKYO GAS CO LTD,FRONTIER TECHNOL RES INST,YOKOHAMA,KANAGAWA,JAPANTOKYO GAS CO LTD,FRONTIER TECHNOL RES INST,YOKOHAMA,KANAGAWA,JAPAN
Reed, ML
[1
]
机构:
[1] TOKYO GAS CO LTD,FRONTIER TECHNOL RES INST,YOKOHAMA,KANAGAWA,JAPAN
来源:
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS
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1996年