Preparation of (Bi, Sb)2S3 semiconductor films by photochemical deposition method

被引:15
作者
Sasaki, H [1 ]
Shibayama, K [1 ]
Ichimura, M [1 ]
Masui, K [1 ]
机构
[1] Nagoya Inst Technol, Dept Elect & Comp Engn, Nagoya, Aichi 4668555, Japan
关键词
surface processes; bismuth compounds; sulfides; semiconducting materials;
D O I
10.1016/S0022-0248(01)02280-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The photochemical deposition (PCD) technique has the advantages of economy, the capability of large area deposition and of a fast reaction rate. In this report, the PCD method using UV light of an ultra-high pressure mercury lamp was applied to form (Bi-x, Sb1-x)(2)S-3 semiconducting compounds from solutions containing BiCl3 and/or SbCl3 Na2S2O3 at pH in the acidic range 1-3. The pH of the solution was adjusted with the addition of dilute HCl solution. The substrate for the film deposition was pretreated onto the commercial pyrex-glass plate surface with the well-known solution agent of I'd activator plus Sn sensitizer. In the PCD process, the film is only deposited onto the irradiated region of the substrate so as to make a pattern using the mask. This deposition process shows the heterogeneous nucleation and growth mechanism on the substrate surface. The deposition rate of the film using a 500 W mercury lamp was about 1 mum/30 min. The crystallization characteristics of the amorphous (Bi2S3) deposits were studied by means of X-ray diffraction, thermal analysis (DSC) and optical transmitted spectra evaluation in order to clarify the amorphous to crystal phase transformation. The amorphous deposits showed gradual light absorption in a wide range of optical wavelengths. On the contrary, annealed film showed a sharp absorption edge near 800 run. The crystallization temperature of the amorphous deposits was about 250-300degreesC. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:2125 / 2129
页数:5
相关论文
共 4 条
[1]   A new technique of compound semiconductor deposition from an aqueous solution by photochemical reactions [J].
Goto, F ;
Ichimura, M ;
Arai, E .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1997, 36 (9AB) :L1146-L1149
[2]   Structural and optical characterization of CdS films grown by photochemical deposition [J].
Ichimura, M ;
Goto, F ;
Arai, E .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (10) :7411-7417
[3]   Deposition of CdS and ZnS from aqueous solutions by a new photochemical technique [J].
Ichimura, M ;
Goto, F ;
Ono, Y ;
Arai, E .
JOURNAL OF CRYSTAL GROWTH, 1999, 198 :308-312
[4]  
Pourbaix M., 1966, ATLAS ELECTROCHEMICA