Improvement of electrical contact at carbon nanotube/Pt by selective electron irradiation

被引：9

作者：

Ando, A

Shimizu, T

Abe, H

Nakayama, Y

Tokumoto, H

机构：

[1] Natl Inst Adv Ind Sci & Technol, Nanoelect Res Inst, Tsukuba, Ibaraki 3058568, Japan

[2] Osaka Prefecture Univ, Dept Phys & Elect, Osaka, Japan

来源：

PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES | 2004年 / 24卷 / 1-2期

关键词：

carbon nanotube; electrical contact; carbon nanotube SPM probe; electron beam irradiation;

D O I：

10.1016/j.physe.2004.04.014

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 [材料科学与工程]; 080502 [材料学];

摘要：

We have demonstrated the fabrication process to obtain good electrical contact between carbon nanotube and Pt-coated cantilever for scanning probe microscopy. The selective electron beam irradiation under DC-biased condition in FE-SEM is effective in reducing contact resistance by orders of magnitudes. The current voltage characteristic after the irradiation suggests that the fabricated contact is highly conductive and of ohmic character. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：6 / 9

页数：4

共 7 条

[1]

Carbon nanotube tips for a scanning probe microscope: their fabrication and properties [J].