Femtosecond and nanosecond laser removal of anodic oxide layers from aluminium

被引:6
作者
Daminelli, G [1 ]
Meja, P [1 ]
Cortona, A [1 ]
Krüger, J [1 ]
Autric, M [1 ]
Kautek, W [1 ]
机构
[1] Fed Inst Mat Res & Testing, Lab Thin Film Technol, D-12205 Berlin, Germany
来源
HIGH-POWER LASER ABLATION IV, PTS 1 AND 2 | 2002年 / 4760卷
关键词
laser ablation; laser spallation; microphone; acoustical measurement; aluminium oxide;
D O I
10.1117/12.482091
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Femtosecond and nanosecond laser ablation and delamination of anodic oxide layers on an aluminium. alloy were investigated. Laser wavelengths of 800 nm (125 fs pulse duration) and 532 nm (7 ns), respectively, and two oxide layers with thicknesses of 70 mum (opaque) and 30 mum (transparent) were considered. Laser-induced shock waves measured by means of a microphone provided an in-situ diagnostic tool for the monitoring of the coating removal process. The transparent anodic oxides showed contrasting ablation mechanisms in the nanosecond and femtosecond pulse duration regime. Nanosecond pulses led to spallation, whereas femtosecond treatment resulted in ablation.
引用
收藏
页码:239 / 246
页数:8
相关论文
共 14 条
[1]   Laser produced plasmas in high fluence ablation of metallic surfaces probed by time-of-flight mass spectrometry [J].
Amoruso, S ;
Amodeo, A ;
Berardi, V ;
Bruzzese, R ;
Spinelli, N ;
Velotta, R .
APPLIED SURFACE SCIENCE, 1996, 96-8 :175-180
[2]  
[Anonymous], LASER PROCESSING CHE
[3]   Optoacoustic analysis of the laser-cleaning process [J].
Bregar, VB ;
Mozina, J .
APPLIED SURFACE SCIENCE, 2002, 185 (3-4) :277-288
[4]   Experimental determination of laser induced breakdown thresholds of metals under nanosecond Q-switched laser operation [J].
Cabalin, LM ;
Laserna, JJ .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1998, 53 (05) :723-730
[5]   Microcorrosion and shock-affected zone investigation at anodic films on aluminium alloys by pulse laser depassivation [J].
Cortona, A ;
Kautek, W .
PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2001, 3 (23) :5283-5289
[6]   NANOSECOND AND FEMTOSECOND EXCIMER-LASER ABLATION OF OXIDE CERAMICS [J].
IHLEMANN, J ;
SCHOLL, A ;
SCHMIDT, H ;
WOLFFROTTKE, B .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 60 (04) :411-417
[7]   Picosecond laser ablation of thin copper films [J].
Jandeleit, J ;
Urbasch, G ;
Hoffmann, HD ;
Treusch, HG ;
Kreutz, EW .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1996, 63 (02) :117-121
[8]  
KRUGER J, IN PRESS APP SURF SC
[9]  
KRUGER J, IN PRESS APPL SURF S
[10]   Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces [J].
Lu, YF ;
Lee, YP ;
Hong, MH ;
Low, TS .
APPLIED SURFACE SCIENCE, 1997, 119 (1-2) :137-146