Engineered sculptured nematic thin films

被引：151

作者：

Messier, R ^{[1
]}

Gehrke, T ^{[1
]}

Frankel, C ^{[1
]}

Venugopal, VC ^{[1
]}

Otano, W ^{[1
]}

Lakhtakia, A ^{[1
]}

机构：

[1] PENN STATE UNIV,DEPT ENGN SCI & MECH,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1997年 / 15卷 / 04期

关键词：

D O I：

10.1116/1.580621

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

By controlling the angular relation of the substrate surface with respect to the incoming vapor direction in an evaporation deposition system, it is possible to engineer the morphology of thin films. Sculptured nematic thin films result under low adatom mobility conditions when the substrates are rotated about an axis perpendicular to the vapor direction. Thin films of MgF2 were deposited onto room temperature substrates to produce columnar morphologies ranging from chevron structures to continuously varied structures resembling S shapes and C shapes. The specific morphologies are virtually unlimited within the restriction that the minimum angle chi(M) of the local columnar direction with respect to the substrate plane is about 30 degrees. (C) 1997 American Vacuum Society.

引用

页码：2148 / 2152

页数：5

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