Low-energy cluster beam deposition: Nucleation and growth of antimony particles on graphite: Experiments and model

We present in this work the TEM results on the nucleation and growth process of antimony particles on graphite produced by low-energy cluster beam deposition. In order to acquire more details about the first stages of film growth, we compare the experimental results with a new theoretical model named ''Deposition-Diffusion-Aggregation''. Moreover this comparison allows an estimate of the diffusion coefficient D for antimony clusters of 5-nm diameter on graphite; we find D approximate to 10(-8) cm(2)/s.