Constructing, connecting and soldering nanostructures by environmental electron beam deposition

被引:67
作者
Molhave, K [1 ]
Madsen, DN [1 ]
Dohn, S [1 ]
Boggild, P [1 ]
机构
[1] Tech Univ Denmark, Mikroelektron Centret, DK-2800 Lyngby, Denmark
关键词
D O I
10.1088/0957-4484/15/8/033
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Highly conductive nanoscale deposits with solid gold cores can be made by electron beam deposition in an environmental scanning electron microscope (ESEM), suggesting the method to be used for constructing, connecting and soldering nanostructures. This paper presents a feasibility study for such applications. We identify several issues related to contamination and unwanted deposition, relevant for deposition in both vacuum (EBD) and environmental conditions (EEBD). We study relations between scan rate, deposition rate, angle and line width for three-dimensional structures. Furthermore, we measure the conductivity of deposits containing gold cores, and find these structures to be highly conductive, approaching the conductivity of solid gold and capable of carrying high current densities. Finally, we study the use of the technique for soldering nanostructures such as carbon nanotubes. Based on the presented results we are able to estimate limits for the applicability of the method for the various applications, but also demonstrate that it is a versatile and powerful tool for nanotechnology within these limits.
引用
收藏
页码:1047 / 1053
页数:7
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