Integration of fiber-coupled high-Q SiNx microdisks with atom chips

被引:116
作者
Barclay, Paul E. [1 ]
Srinivasan, Kartik
Painter, Oskar
Lev, Benjamin
Mabuchi, Hideo
机构
[1] CALTECH, Thomas J Watson Lab Appl Phys, Pasadena, CA 91125 USA
[2] CALTECH, Norman Bridge Lab Phys, Pasadena, CA 91125 USA
关键词
D O I
10.1063/1.2356892
中图分类号
O59 [应用物理学];
学科分类号
摘要
Micron scale silicon nitride (SiNx) microdisk optical resonators are demonstrated with Q=3.6x10(6) and an effective mode volume of 15(lambda/n)(3) at near-visible wavelengths. A hydrofluoric acid wet etch provides sensitive tuning of the microdisk resonances, and robust mounting of a fiber taper provides efficient fiber optic coupling to the microdisks while allowing unfettered optical access for laser cooling and trapping of atoms. Measurements indicate that cesium adsorption on the SiNx surfaces significantly red detunes the microdisk resonances. Parallel integration of multiple (10) microdisks with a single fiber taper is also demonstrated. (c) 2006 American Institute of Physics.
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页数:3
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