Thermal Properties of Graphene-Copper-Graphene Heterogeneous Films

被引:320
作者
Goli, Pradyumna [1 ]
Ning, Hao [2 ]
Li, Xuesong [2 ]
Lu, Ching Yu [2 ]
Novoselov, Konstantin S. [3 ]
Balandin, Alexander A. [1 ]
机构
[1] Univ Calif Riverside, Dept Elect Engn, Bourns Coll Engn, Nanodevice Lab, Riverside, CA 92521 USA
[2] Bluestone Global Tech, Wappingers Falls, NY 12590 USA
[3] Univ Manchester, Sch Phys & Astron, Manchester M13 9PL, Lancs, England
基金
美国国家科学基金会;
关键词
Graphene; copper; thermal properties; graphene coating; graphene-copper interconnects; thermal conductivity; SIZE; CONDUCTIVITY; LAYER; TRANSPORT; CAPACITY; GROWTH;
D O I
10.1021/nl404719n
中图分类号
O6 [化学];
学科分类号
070301 [无机化学];
摘要
We demonstrated experimentally that graphene-Cu-graphene heterogeneous films reveal strongly enhanced thermal conductivity as compared to the reference Cu and annealed Cu films. Chemical vapor deposition of a single atomic plane of graphene on both sides of 9 mu m thick Cu films increases their thermal conductivity by up to 24% near room temperature. Interestingly, the observed improvement of thermal properties of graphene Cu graphene heterofilms results primarily from the changes in Cu morphology during graphene deposition rather than from graphene's action as an additional heat conducting channel. Enhancement of thermal properties of graphene-capped Cu films is important for thermal management of advanced electronic chips and proposed applications of graphene in the hybrid graphene-Cu interconnect hierarchies.
引用
收藏
页码:1497 / 1503
页数:7
相关论文
共 35 条
[1]
Bae S, 2010, NAT NANOTECHNOL, V5, P574, DOI [10.1038/nnano.2010.132, 10.1038/NNANO.2010.132]
[2]
Balandin AA, 2011, NAT MATER, V10, P569, DOI [10.1038/nmat3064, 10.1038/NMAT3064]
[3]
Ultraviolet Raman microscopy of single and multilayer graphene [J].
Calizo, Irene ;
Bejenari, Igor ;
Rahman, Muhammad ;
Liu, Guanxiong ;
Balandin, Alexander A. .
JOURNAL OF APPLIED PHYSICS, 2009, 106 (04)
[4]
Chen ZP, 2011, NAT MATER, V10, P424, DOI [10.1038/NMAT3001, 10.1038/nmat3001]
[5]
Flinn R. A., 1981, ENG MAT THEIR APPL E
[6]
THE STUDY OF GRAIN-SIZE DEPENDENCE OF YIELD STRESS OF COPPER FOR A WIDE GRAIN-SIZE RANGE [J].
GERTSMAN, VY ;
HOFFMANN, M ;
GLEITER, H ;
BIRRINGER, R .
ACTA METALLURGICA ET MATERIALIA, 1994, 42 (10) :3539-3544
[7]
Ghosh S, 2010, NAT MATER, V9, P555, DOI [10.1038/NMAT2753, 10.1038/nmat2753]
[8]
Near-field thermal radiation transfer controlled by plasmons in graphene [J].
Ilic, Ognjen ;
Jablan, Marinko ;
Joannopoulos, John D. ;
Celanovic, Ivan ;
Buljan, Hrvoje ;
Soljacic, Marin .
PHYSICAL REVIEW B, 2012, 85 (15)
[9]
Effects of multi-layer graphene capping on Cu interconnects [J].
Kang, Chang Goo ;
Lim, Sung Kwan ;
Lee, Sangchul ;
Lee, Sang Kyung ;
Cho, Chunhum ;
Lee, Young Gon ;
Hwang, Hyeon Jun ;
Kim, Younghun ;
Choi, Ho Jun ;
Choe, Sun Hee ;
Ham, Moon-Ho ;
Lee, Byoung Hun .
NANOTECHNOLOGY, 2013, 24 (11)
[10]
Observing Graphene Grow: Catalyst-Graphene Interactions during Scalable Graphene Growth on Polycrystalline Copper [J].
Kidambi, Piran R. ;
Bayer, Bernhard C. ;
Blume, Raoul ;
Wang, Zhu-Jun ;
Baehtz, Carsten ;
Weatherup, Robert S. ;
Willinger, Marc-Georg ;
Schloegl, Robert ;
Hofmann, Stephan .
NANO LETTERS, 2013, 13 (10) :4769-4778