Interface thermal conductance and the thermal conductivity of multilayer thin films

被引:87
作者
Cahill, DG
Bullen, A
Lee, SM
机构
[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Coordinated Sci Lab, Urbana, IL 61801 USA
关键词
D O I
10.1068/htwi9
中图分类号
O414.1 [热力学];
学科分类号
摘要
Accurate and simple measurements of the thermal conductivity of thin films deposited on high thermal conductivity substrates have been recently enabled by the development of an Ac hot-wire method, the 3 omega method. Recent progress in the measurement and understanding of heat transport in ultra-thin films (much less than 1 mu m thick) and multilayers is reviewed, and the possibility of using solid-solid interfaces on nanometer length scales to control heat transport in thin film materials is explored. The finite thermal conductance of solid-solid interfaces becomes important when considering heat transport in single layer films <100 nm thick. Through the use of multilayer films-for example, epitaxial superlattices of crystalline semiconductors or nanometer-thick layers of amorphous and microcrystalline oxides-we can study materials with an extremely high and controllable density of internal interfaces, and evaluate the effect of these interfaces on heat transport. For the case of Si-Ge superlattices, the relatively large mismatch of the vibrational properties of silicon and germanium creates a larger reduction in thermal conductivity than for GaAs-A1As superlattices. Surprisingly, heat conduction in multilayers of disordered oxides is essentially unchanged by a high interface density.
引用
收藏
页码:135 / 142
页数:8
相关论文
共 24 条
  • [1] WIDE-FREQUENCY SPECIFIC-HEAT SPECTROMETER
    BIRGE, NO
    NAGEL, SR
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (08) : 1464 - 1470
  • [2] THERMAL-CONDUCTIVITY OF ALPHA-SIH THIN-FILMS
    CAHILL, DG
    KATIYAR, M
    ABELSON, JR
    [J]. PHYSICAL REVIEW B, 1994, 50 (09): : 6077 - 6081
  • [3] Cahill DG, 1998, S CHEM MECH, P95
  • [4] THERMAL-CONDUCTIVITY MEASUREMENT FROM 30-K TO 750-K - THE 3-OMEGA METHOD
    CAHILL, DG
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (02) : 802 - 808
  • [5] LOWER LIMIT TO THE THERMAL-CONDUCTIVITY OF DISORDERED CRYSTALS
    CAHILL, DG
    WATSON, SK
    POHL, RO
    [J]. PHYSICAL REVIEW B, 1992, 46 (10): : 6131 - 6140
  • [6] Thermal conductivity of GaAs/AlAs superlattices
    Capinski, WS
    Maris, HJ
    [J]. PHYSICA B-CONDENSED MATTER, 1996, 219-20 : 699 - 701
  • [7] Thermal conductivity and ballistic-phonon transport in the cross-plane direction of superlattices
    Chen, G
    [J]. PHYSICAL REVIEW B, 1998, 57 (23): : 14958 - 14973
  • [8] DEVYATKOVA ED, 1961, SOV PHYS-SOL STATE, V3, P970
  • [9] EFFECT OF REINFORCEMENT PARTICLE-SIZE ON THE THERMAL-CONDUCTIVITY OF A PARTICULATE SILICON CARBIDE-REINFORCED ALUMINUM-MATRIX COMPOSITE
    GEIGER, AL
    HASSELMAN, DPH
    DONALDSON, KY
    [J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1993, 12 (06) : 420 - 423
  • [10] EXPERIMENTAL INVESTIGATION OF THERMAL CONDUCTION NORMAL TO DIAMOND-SILICON BOUNDARIES
    GOODSON, KE
    KADING, OW
    ROSLER, M
    ZACHAI, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (04) : 1385 - 1392