Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics

被引:107
作者
Sanner, N. [1 ]
Uteza, O. [1 ]
Bussiere, B. [1 ,2 ]
Coustillier, G. [1 ]
Leray, A. [1 ]
Itina, T. [1 ]
Sentis, M. [1 ]
机构
[1] Univ Aix Marseille 2, CNRS, UMR 6182, Lab LP3, F-13288 Marseille 9, France
[2] Amplitude Technol, CE2926, F-91029 Evry, France
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2009年 / 94卷 / 04期
关键词
TRANSPARENT MATERIALS; INDUCED BREAKDOWN; OPTICAL-BREAKDOWN; FUSED-SILICA; PULSE DURATION; DYNAMICS; NANOSECOND; IONIZATION; ABSORPTION; LENSES;
D O I
10.1007/s00339-009-5077-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The paper is focused on the importance of accurate determination of surface damage/ablation threshold of a dielectric material irradiated with femtosecond laser pulses. We show that different damage characterization techniques and data treatment procedures from a single experiment provide complementary physical results characterizing laser-matter interaction. We thus compare and discuss two regression techniques, well adapted to the measurement of laser ablation threshold, and a statistical approach giving the laser damage threshold and further information concerning the deterministic character of femtosecond damage. These two measurements are crucial for laser micromachining processes and high peak-power laser technology in general.
引用
收藏
页码:889 / 897
页数:9
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