Low voltage electrowetting using thin fluoroploymer films

被引:127
作者
Berry, Shaun
Kedzierski, Jakub
Abedian, Behrouz
机构
[1] MIT, Lincoln Lab, Lexington, MA 02420 USA
[2] Tufts Univ, Dept Mech Engn, Medford, MA 02155 USA
关键词
electrowetting; electrocapillary; saturation; surface energy; contact angle; sodium dodecyl sulfate; dodecane; amorphous fluoroploymer; dielectric; microfluidics;
D O I
10.1016/j.jcis.2006.08.004
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This paper investigates the nonideal electrowetting behavior of thin fluoroploymer films. Results are presented for a three phase system consisting of: (1) an aqueous water droplet containing sodium dodecyl sulfate (SDS), (2) phosphorous-doped silicon topped with SiO2 and an amorphous fluoroploymer (aFP) insulating top layer on which the droplet is situated, and (3) a dodecane oil that surrounds the droplet. The presented measurements indicate that the electrowetting equation is valid down to a 6 nm thick aFP film on a 11 nm thick SiO2. At this dielectric thickness, a remarkable contact angle change of over 100 degrees can be achieved with an applied voltage less than 3 V across the system. The data also shows that for this water/surfactant/oil system, contact angle saturation is independent of the electric field, and is reached when the surface energy of the solid-water interface approaches zero. (c) 2006 Elsevier Inc. All rights reserved.
引用
收藏
页码:517 / 524
页数:8
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