Development of 4 in field-emission displays

被引：6

作者：

Gorfinkel, B ^{[1
]}

Kim, JM ^{[1
]}

机构：

[1] SAMSUNG ADV INST TECHNOL,DISPLAYS MAT LAB,SUWON 440600,SOUTH KOREA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.589285

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article describes experimental results on the fabrication of monochrome 4 in. field-emission displays (FEDs) on soda-lime glass substrates for practical use in manufacturing display. By fabrication of the Spindt-type field emitters without utilizing conventional resistive layers, several parameters closely related to these emitter arrays are discussed. In addition, analytical studies on the process environments of microtip fabrication and their related processes for FED mass production are significantly focused in this article. The characteristics of the field-emission quality is improved using unique gas and electrical aging effects on the microtip. (C) 1997 American Vacuum Society.

引用

页码：524 / 527

页数：4

共 9 条

[1]

BAPTIST R, 1996, IVMC 96, P19

[2]

Courreges F., 1996, Information Display, V12, P10

[3] SEALED VACUUM DEVICES - FLUORESCENT MICROTIP DISPLAYS [J].

GHIS, A ;

MEYER, R ;

RAMBAUD, P ;

LEVY, F ;

LEROUX, T .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (10) :2320-2322

[4]

GORFINKEL BI, 1993, INORG MATER, V29, P1379

[5]

ITOH T, 1994, IVMC 94, P217

[6]

Levine J. D., 1995, IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.95TH8012), P67, DOI 10.1109/IVMC.1995.486992

[7]

MEYER R, 1991, IVMC 91, P6

[8] PHYSICAL-PROPERTIES OF THIN-FILM FIELD-EMISSION CATHODES WITH MOLYBDENUM CONES [J].

SPINDT, CA ;

BRODIE, I ;

HUMPHREY, L ;

WESTERBERG, ER .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) :5248-5263

[9]

TANAKA M, 1996, IDW 96, P151

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