Nanostripe patterning of glass surface by nanoimprint using self-organized oxide mold

被引:7
作者
Akita, Yasuyuki [1 ]
Kato, Yushi [1 ]
Hosaka, Makoto [1 ]
Ono, Yusaburo [1 ]
Suzuki, Shunsuke [2 ]
Nakajima, Akira [2 ]
Yoshimoto, Mamoru [1 ]
机构
[1] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Midori Ku, Kanagawa 2268503, Japan
[2] Tokyo Inst Technol, Grad Sch Sci & Engn, Meguro Ku, Tokyo 1528882, Japan
来源
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2009年 / 161卷 / 1-3期
关键词
Aluminum oxide; Oxide glass; Surface morphology; Nanostructure; Nanoimprint; IMPRINT LITHOGRAPHY; SAPPHIRE; FABRICATION;
D O I
10.1016/j.mseb.2009.01.017
中图分类号
T [工业技术];
学科分类号
120111 [工业工程];
摘要
We investigated nanoscale surface modifications of silicate glass plates by applying a thermal nanoimprint technique, in which self-organized nanopattern molds of sapphire (alpha-Al2O3 single crystal) wafer were used. Nanopatterns of the sapphire mold exhibited regularly arranged straight atomic-steps with a uniform height of 0.2 nm and atomically flat terraces about 80 run in width. We succeeded in forming subnanometer-stepped surfaces of glass. By pressing the glass plate over the mold and then slowly cooling (3 degrees C/min), a three-dimensional nanostriped pattern (periodic distance of 60-85 nm and peak-to-valley height of 8 nm) was obtained on the glass plate. Softening behavior of the nanopatterned glass morphology was observed at temperatures about 20 degrees C lower than the glass transition temperature of the bulk glass. The Vickers hardness of the nanostriped glass was estimated to be higher than that of non-patterned glass, and the surface of the nanostriped glass was more hydrophobic than that of non-patterned glass. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:151 / 154
页数:4
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