Nanoscale scanning transmission electron tomography

被引:38
作者
Midgley, P. A.
Weyland, M.
Yates, T. J. V.
Arslan, I.
Dunin-Borkowski, R. E.
Thomas, J. M.
机构
[1] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
[2] UCL Royal Inst Great Britain, London W1S 4BS, England
关键词
electron tomography; nanotechnology; scanning transmission electron microscopy high angle annular dark field (HAADF) imaging;
D O I
10.1111/j.1365-2818.2006.01616.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
Electron tomography enables the study of complex three-dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy-based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.
引用
收藏
页码:185 / 190
页数:6
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