Surface modification of tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA) by remote hydrogen plasma and surface metallization with electroless plating of copper metal

被引：42

作者：

Inagaki, N ^{[1
]}

Tasaka, S ^{[1
]}

Narushima, K ^{[1
]}

Mochizuki, K ^{[1
]}

机构：

[1] Shizuoka Univ, Fac Engn, Polymer Chem Lab, Hamamatsu, Shizuoka 4328561, Japan

来源：

MACROMOLECULES | 1999年 / 32卷 / 25期

关键词：

D O I：

10.1021/ma990550l

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

PFA sheets were modified with remote hydrogen plasma, and effects of the modification on the adhesion between copper layer and FEP were investigated. Remote hydrogen plasma treatment for a short time of 30 s is able to make the PFA surface hydrophilic. The remote hydrogen plasma treatment causes defluorination and oxidation of PFA surface. The extent of the defluorination is 42-48%, and the oxidation reaches 9-13% of the total carbon atoms. The modification of the PFA surface by the remote hydrogen plasma is effective in the adhesion to copper metal. The peel strength for the copper metal/PFA system is improved from 0 to 101 mN/5 mm by the surface modification. The failure mode of the copper metal/PFA system is an inner layer of the plasma-treated PFA layer. The remote hydrogen plasma treatment is the preferable pretreatment of the PFA surface for adhesion with copper metal.

引用

页码：8566 / 8571

页数：6

共 19 条

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