Fabrication process of fine electrodes using shadow mask evaporation and tip-induced local oxidation

被引：1

作者：

Akai, T

Abe, T

Ishibashi, M

Kato, M

Heike, S

Shimomura, T

Okai, M

Hashizume, T

Ito, K

机构：

[1] Univ Tokyo, Grad Sch Frontier Sci, Dept Adv Mat Sci, Bunkyo Ku, Tokyo 1138656, Japan

[2] Hitachi Ltd, Adv Res Lab, Hatoyama, Saitama 3500395, Japan

[3] Hitachi Ltd, Displays Mat Design Ctr, Kokubunji, Tokyo 1858601, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 7B期

关键词：

tip-induced local oxidation; shadow mask evaporation; atomic force microscope; nano-fabrication; molecular devices; carbon nanotube;

D O I：

10.1143/JJAP.41.4883

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on a simple process for fabricating fine electrodes by using shadow mask evaporation and tip-induced local oxidation. A set of electrodes for four-term resistance measurement has been fabricated. The gap width between the fine electrode was 150 nm and the roughness of the electrode surface was less than 0.5 nm. We were able to use the electrodes to measure the conductivity of a multiwalled carbon nanotube (MWNT).

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收藏

页码：4883 / 4886

页数：4

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