Nanoporous silica as an ultralow-k dielectric

被引：124

作者：

Jin, CM

Luttmer, JD

Smith, DM

Ramos, TA

机构：

来源：

关键词：

D O I：

10.1557/S0883769400034187

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：39 / 42

页数：4

共 16 条

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