Diamond microwave micro relay

被引：25

作者：

Adamschik, M

Kusterer, J

Schmid, R

Schad, KB

Grobe, D

Flöter, A

Kohn, E

机构：

[1] Univ Ulm, D-89081 Ulm, Germany

[2] GFDmbH, D-89081 Ulm, Germany

来源：

关键词：

diamond growth; diamond MEMS; micro relay; micro switch;

D O I：

10.1016/S0925-9635(01)00619-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Based on the technology of the electrostatically actuated cantilever micro switch, entirely made of diamond on a Si-baseplate (except for the final top interconnect metal level) [reported previously] and based on the static and dynamic switching characteristics [reported previously], in coplanar arrangement was designed, fabricated and successfully operated. Due to the DC-coupling the new MEMS-relay allows switching of bias and signal simultaneously. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：672 / 676

页数：5