Adhesion, oxidation and wear properties of compositionally gradient (Ti1-xAlx)N coatings made by plasma enhanced chemical vapour deposition

被引：13

作者：

Kim, BJ ^{[1
]}

Lee, SH ^{[1
]}

Lee, JJ ^{[1
]}

机构：

[1] HYUNDAI ELECT IND CO LTD,INCHON 467701,KYOUNGKI,SOUTH KOREA

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1997年 / 16卷 / 19期

关键词：

D O I：

10.1023/A:1018528704190

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1597 / 1599

页数：3

共 6 条

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LEE, JJ .

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[3] (TI1-XALX)N COATINGS BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION [J].

LEE, SH ;

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (04) :1602-1607

[4] Structural analysis of AlN and (Ti1-xAlx)N coatings made by plasma enhanced chemical vapor deposition [J].

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Kim, HH ;

Lee, JJ .

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[5] THE DEVELOPMENT OF THE PVD COATING TIALN AS A COMMERCIAL COATING FOR CUTTING TOOLS [J].

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ESSER, S ;

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[6]

MUNZ WD, 1986, J VAC SCI TECHNOL A, V4, P2717, DOI 10.1116/1.573713

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