Laser direct writing of palladium on polyimide surfaces from solution

被引：20

作者：

Kordás, K

Bali, K

Leppävuori, S

Uusimäki, A

Nánai, L

机构：

[1] Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

[2] Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

[3] Univ Oulu, EMPART Res Grp, Infotech Oulu, FIN-90570 Oulu, Finland

[4] Juhasz Gyula Coll Ped, Dept Phys, H-6720 Szeged, Hungary

来源：

APPLIED SURFACE SCIENCE | 1999年 / 152卷 / 3-4期

基金：

匈牙利科学研究基金会;

关键词：

laser direct writing; metal deposition; palladium; polyimide; LCLD;

D O I：

10.1016/S0169-4332(99)00326-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Conductive palladium (Pd) patterns were generated by laser-induced chemical liquid-phase deposition (LCLD) on polyimide (PI) substrates using a continuous Ar+ laser beam. The deposition process was executed from the amine complex solution of Pd2+ ions. Dependence of the characteristics of the laser direct written patterns on scanning speed of the laser beam, number of scans and laser power was examined. Deposits were characterised by Field Emission Scanning Electron Microscope (FESEM), Energy Dispersive Spectrometry (EDS), and profilometric measurements. The resistance of the patterns was also measured. It was found that good quality lines - narrow, homogeneous, and with high conductivity and adhesion - were achieved under optimized conditions. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：149 / 155

页数：7

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